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Micro and Nanomachining

Rose Garden_Hyde Park_London_UK_060815A
(Rose Garden, London, UK - Hsi-Pin Ma)


Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS)


[Institute of Microengineering and Nanoelectronics]: Microelectromechanical systems (MEMS) is a system that integrates mechanical, sensor, actuator and electronic elements on one chip through microfabrication and nanotechnology. The field of MEMS encompasses devices created with micromachining technologies originally developed to produce integrated circuits, as well as non-silicon based devices created by the same micromachining or other techniques. They can be classified as sensors, actuators and passive structures.

Sensors and actuators are transducers that convert one physical quantity to another, such as electromagnetic, mechanical, chemical, biological, optical or thermal phenomena. MEMS sensors commonly measure pressure, force, linear acceleration, rate of angular motion, torque, and flow. The sensing or actuation conversion con use a variety of methods. MEMS actuators provide the ability to manipulate physical parameters at the microscale, and can employ eletrostatic, thermal, magnetic, piezoelectric, piezores istive, and shape memory transformation methods. Passive MEMS structures such as micronozzles are used in atomizers, medical inhalers, fluid spray systems, fuel injection, and ink jet printers.


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